Ultra high vacuum pumping system and high sensitivity helium lea

Details Ultra high vacuum pumping system and high sensitivity helium lea Ultra high vacuum pumping system and high sensitivity helium lea

1996-05-08

1997-12-30

Brock, Michael

Measuring and testing

With fluid pressure

Leakage

G01M 320

Patent

active

057032815

ABSTRACT:
An improved helium leak detection method and apparatus are disclosed which increase the leak detection sensitivity to 10.sup.-13 atm cc s.sup.-1. The leak detection sensitivity is improved over conventional leak detectors by completely eliminating the use of o-rings, equipping the system with oil-free pumping systems, and by introducing measured flows of nitrogen at the entrances of both the turbo pump and backing pump to keep the system free of helium background. The addition of dry nitrogen flows to the system reduces backstreaming of atmospheric helium through the pumping system as a result of the limited compression ratios of the pumps for helium.

REFERENCES:
patent: 3577769 (1971-05-01), Roberts
patent: 3578758 (1971-05-01), Altshuler
patent: 3762212 (1973-10-01), Morley et al.
patent: 5049168 (1991-09-01), Danielson
patent: 5131263 (1992-07-01), Handke et al.
patent: 5386717 (1995-02-01), Toda

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