Ultra high vacuum heating and rotating specimen stage

Details Ultra high vacuum heating and rotating specimen stage Ultra high vacuum heating and rotating specimen stage

1993-12-02

1995-05-02

Walberg, Teresa J.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219211, 118730, 118725, C23C 1646, H05B 368

Patent

active

054121809

ABSTRACT:
A heating and rotating specimen stage provides for simultaneous specimen heating and rotating. The stage is ideally suited for operation in ultrahigh vacuum (1.times.10.sup.-9 torr or less), but is useful at atmosphere and in pressurized systems as well. A specimen is placed on a specimen holder that is attached to a heater that, in turn, is attached to a top housing. The top housing is rotated relative to a bottom housing and electrically connected thereto by electrically conductive brushes. This stage is made of materials that are compatible with UHV, able to withstand high temperatures, possess low outgassing rates, are gall and seize resistant, and are able to carry substantial electrical loading without overheating.

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