Ultra-high temperature micro-electro-mechanical systems...

Thermal measuring and testing – Differential thermal analysis

Reexamination Certificate

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Details

C374S029000, C374S039000, C438S458000

Reexamination Certificate

active

07338202

ABSTRACT:
Novel micro electro mechanical systems (MEMS)-based sensors for use in ultra-high temperature environments are disclosed. The MEMS-based sensors are derived from a class of polymer-derived ceramics selected from the group consisting of SiCN, SiBCN and SiAlCN. The materials of construction are such that, the sensors are capable of accurate, real-time, on-line and in-situ monitoring, suppression of combustion oscillations and detailed measurements in operating structures that have temperatures of from about 1500° K to about 2000° K, extreme pressures/turbulence and harsh chemical off gases. When the novel sensors are mounted on a hot gas path wall, such as, at a combustor exit, there can be a continuous monitoring of pressure pulses/oscillations, wall shear stress, temperature and surface heat flux.

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