Ultra-high sensitivity interferometer

Details Ultra-high sensitivity interferometer Ultra-high sensitivity interferometer

1984-12-20

1985-10-22

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356363, G01B 902

Patent

active

045485020

ABSTRACT:
A multiple reflections interferometer (MRI) which eliminates the normal angle of incidence requirement of other interferometers, such as the standard Michelson interferometer (SMI), and allows convenient choices of interferometric sensitivities, such as exactly 100 nanometers per cycle or 10 nanometers per cycle using a helium-neon laser. The MRI has the mirror that usually receives the normal incidence beam replaced by a two-mirror wedge produce multiple reflections therein to provide greater displacement sensitivities.

REFERENCES:
patent: 3976379 (1976-08-01), Morokuma
Sergeev, "On the Possibility of Changing the Value of an Interference . . . , Sou. J. Opt. Tech., vol. 44, No. 2, pp. 109-110, 2/77.
Chandra et al., "Ultrasensitive Multiple-Reflections Interferometer", Applied Optics, vol. 21, No. 9, pp. 1533-1535, May 1982.

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