Ultra high resolution wave focusing method and apparatus and sys

Details Ultra high resolution wave focusing method and apparatus and sys Ultra high resolution wave focusing method and apparatus and sys

1998-08-03

2000-02-01

Ben, Loha

Optical: systems and elements

Optical modulator

Light wave temporal modulation

246264, 246562, 246558, 382124, 73614, G02F 101

Patent

active

060209887

ABSTRACT:
An ultra high resolution wave focusing method and apparatus is disclosed. The invention provides a focusing system having an effective numerical aperture greater than that possible using known conventional focusing techniques. By the method and apparatus of the invention, a wave of arbitrary wavefront profile and wavelength .lambda. is focused to a region of high amplitude having a spot size that approaches the fundamental limit of 0.25.lambda.. Imaging and patterning systems employing such a wave focusing method and apparatus provide ultra high resolution and ultra small feature sizes beyond the capabilities of systems utilizing conventional focusing elements.

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M. Schrader et al., Optical Transfer Functions of 4P1 Confocal Microscopes: Theory and Experiment, Optics Letters/Vo. 22, No. 7, Apr. 1, 1997, pp. 436-438.

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