Coherent light generators – Particular resonant cavity
Reexamination Certificate
2003-10-02
2009-06-09
Harvey, Minsun (Department: 2828)
Coherent light generators
Particular resonant cavity
C372S094000, C372S067000, C372S019000
Reexamination Certificate
active
07545843
ABSTRACT:
A micro-cavity resonator including a micro-cavity capable of high and ultra-high Q values and a silicon substrate. Portions of the silicon substrate located below a periphery of the micro-cavity are removed to form a pillar, which supports the micro-cavity. Optical energy travels along an inner surface of the micro-cavity.
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Armani Deniz K.
Kippenberg Tobias J.
Spillane Sean M.
Vahala Kerry J.
California Institute of Technology
Connolly Bove & Lodge & Hutz LLP
Harvey Minsun
Roy Tod T Van
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