Ultra-high Q micro-resonator and method of fabrication

Coherent light generators – Particular resonant cavity

Reexamination Certificate

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C372S094000, C372S067000, C372S019000

Reexamination Certificate

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07545843

ABSTRACT:
A micro-cavity resonator including a micro-cavity capable of high and ultra-high Q values and a silicon substrate. Portions of the silicon substrate located below a periphery of the micro-cavity are removed to form a pillar, which supports the micro-cavity. Optical energy travels along an inner surface of the micro-cavity.

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