Ultra-high purity nitrogen trifluoride production method, and un

Details Ultra-high purity nitrogen trifluoride production method, and un Ultra-high purity nitrogen trifluoride production method, and un

1997-05-14

1998-11-10

Capossela, Ronald C.

Refrigeration

Cryogenic treatment of gas or gas mixture

Separation of gas mixture

62626, 62918, 62928, F25J 100

Patent

active

058327460

ABSTRACT:
An ultra-high purity nitrogen trifluoride production method comprises: pressurizing a nitrogen trifluoride feed gas, eliminating moisture and carbon dioxide from the feed gas, and cooling down the same feed gas; causing the cooled feed gas to pass through adsorption columns, and introducing it into a medium-pressure rectification column by way of a reboiler in the medium-pressure rectification column, where it is rectified in the medium-pressure rectification column; introducing the resulting gas obtained by this rectification into a middle stage of a low-pressure rectification column, where it is rectified; and taking out ultra-high purity nitrogen trifluoride obtained by virtue of this rectification from the lower part of the low-pressure rectification column.

REFERENCES:
patent: 2960835 (1960-11-01), Gaumer, Jr.
patent: 3620030 (1971-11-01), Iikubo et al.
patent: 5150577 (1992-09-01), Mitchell et al.
patent: 5502969 (1996-04-01), Jin et al.
patent: 5626023 (1997-05-01), Fisher et al.

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