Ultra-high purity nitrogen generating method

Details Ultra-high purity nitrogen generating method Ultra-high purity nitrogen generating method

1993-08-05

1995-08-15

Langel, Wayne

Chemistry of inorganic compounds

Nitrogen or compound thereof

62 24, 422190, C01B 2104

Patent

active

054417198

ABSTRACT:
An ultra-high purity nitrogen generating method is disclosed which comprises: oxidizing feed nitrogen gas containing oxygen added therein so that carbon monoxide in the feed nitrogen gas is converted for removal to carbon dioxide and hydrogen to water; then introducing the feed nitrogen gas to a nitrogen rectification column, and taking out liquid nitrogen containing unreacted oxygen from the lower portion thereof; adding nitrogen gas obtained by gas liquid separation in a gas-liquid separator and containing the unreacted oxygen gas to the feed nitrogen gas, and using a resulting mixture in circulation; taking out high purity nitrogen gas from the top portion of the nitrogen rectification column, condensing in a condenser the taken out high purity nitrogen gas by liquid nitrogen from the gas-liquid separator, refluxing the condensed nitrogen gas to the upper portion of the nitrogen rectification column as a reflux liquid, and taking out ultra-high purity nitrogen gas or ultra-high purity liquid nitrogen. An ultra-high purity nitrogen generator therefor is also provided.

REFERENCES:
patent: 3240554 (1966-03-01), Angerhofer
patent: 3388973 (1968-06-01), Marquardt et al.
patent: 4960579 (1990-10-01), Campbell
patent: 5077029 (1991-12-01), Schaub
patent: 5170630 (1992-12-01), Stern
patent: 5238670 (1993-08-01), Louise et al.

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