Refrigeration – Storage of solidified or liquified gas – With vapor discharged from storage receptacle
Patent
1996-05-22
1997-07-08
Kilner, Christopher
Refrigeration
Storage of solidified or liquified gas
With vapor discharged from storage receptacle
62 502, F17C 902
Patent
active
056449216
ABSTRACT:
A method and apparatus for storing ultra high purity non-cryogenic liquefied compressed gases, such as ammonia (NH.sub.3), and delivering a vaporized gaseous product from those liquefied gases for semiconductor processing applications. The delivery method includes withdrawing and heating gaseous product from a storage vessel containing the liquefied compressed gas, and then piping the heated gas through the liquid contained in the storage vessel in a heat exchange fashion. The heat exchange with the liquid inside the vessel induces boiling to maintain a vaporized gaseous product under a minimum positive pressure in said vessel. After liberating its heat, the gaseous product is delivered to a semiconductor manufacturing point of use.
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Air Products and Chemicals Inc.
Chase Geoffrey L.
Kilner Christopher
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