Ultra-high purity Bourdon tube pressure gauge system

Details Ultra-high purity Bourdon tube pressure gauge system Ultra-high purity Bourdon tube pressure gauge system

1998-02-12

1999-09-14

Felber, Joseph L.

Measuring and testing

Fluid pressure gauge

Bourdon

73741, G01L 704

Patent

active

059525797

ABSTRACT:
A reduced volume socket body and a reduced volume tube are used in a pressure gauge system in semi-conductor fabrication process equipment. The socket body includes an outlet and the tube has an end connected to the outlet. The outlet is a shaped, weld prep formed on the socket body having an inner surface. A continuous seat is formed on the outlet and includes a seat thickness. The tube has an inner wall and an outer wall defining a wall thickness which is substantially the same as the seat thickness. The end of the tube is engaged with the seat so that the inner wall of the tube and the inner surface of the outlet are substantially aligned to form a crevice free tube-to-socket connection.

REFERENCES:
patent: 18129 (1857-09-01), Ashcroft
patent: 1537338 (1925-05-01), Deverall
patent: 5591918 (1997-01-01), Ferguson

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