Gas separation – Two or more separators – Three or more serially spaced
Patent
1991-03-12
1992-05-19
Spitzer, Robert
Gas separation
Two or more separators
Three or more serially spaced
55482, 55523, 2105101, B01D 4612, B01D 3920
Patent
active
051144476
ABSTRACT:
An ultra-high efficiency particulate air filter for use in the microelectronics manufacturing industry is formed as a fully homogeneous sintered metal filter that exhibits an efficiency substantially in excess of a 6 log reduction and preferably equal to or exceeding a 9 log reduction (an efficiency of 99.9999999%). The filter can be used as a process gas in-line filter in state of the art gas supply systems. The porous metal filter exhibits long term stability relative to mechanical or thermal stress and operates within the desired ultra-high efficiency levels even under high pressure conditions. It does not exhibit an outgassing problem and there is no particle shedding. These features are provided within a unit no larger than those conventionally employed heretofore with organic membranes and under substantially identical operating conditions.
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Mott Metallurgical Corporation
Spitzer Robert
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