Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...
Patent
1997-06-20
1998-10-06
Ngo, Ngan V.
Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Field effect device in non-single crystal, or...
257368, 257383, H01L 2976, H01L 31036, H01L 31112
Patent
active
058180699
ABSTRACT:
A three-dimensional integrated circuit and fabrication process is provided for producing active and passive devices on various levels of the integrated circuit. The present process is particularly suited to interconnecting a source of one transistor to a drain of another to form series-connected transistors often employed in core logic units. A junction of an underlying transistor can be connected to a junction of an overlying transistor, with both transistors separated by an interlevel dielectric. The lower transistor junction is connected to the upper level transistor junction using a plug conductor. The plug conductor and, more specifically, the mutually connected junction, is further coupled to a laterally extended interconnect. The interconnect extends from the mutual connection point of the plug conductor to a substrate of the overlying transistor. Accordingly, the source and substrate of the overlying transistor can be connected to a drain of the underlying transistor to not only achieve series-connection but also to connect the source and substrate of an internally configured transistor for the purpose of reducing body effects.
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Gardner Mark I.
Kadosh Daniel
Advanced Micro Devices , Inc.
Daffer Kevin L.
Ngo Ngan V.
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