Stock material or miscellaneous articles – All metal or with adjacent metals – Composite; i.e. – plural – adjacent – spatially distinct metal...
Reexamination Certificate
2007-07-03
2007-07-03
Zimmerman, John J. (Department: 1775)
Stock material or miscellaneous articles
All metal or with adjacent metals
Composite; i.e., plural, adjacent, spatially distinct metal...
C428S652000, C428S938000, C204S192160, C427S250000, C427S554000
Reexamination Certificate
active
10946051
ABSTRACT:
Performance and reliability of microelectromechanical system (MEMS) components enhanced dramatically through the incorporation of protective thin film coatings. Current-generation MEMS devices prepared by the LIGA technique employ transition metals such as Ni, Cu, Fe, or alloys thereof, and hence lack stability in oxidizing, corrosive, and/or high temperature environments. Fabrication of a superhard, self-lubricating coating based on a ternary boride compound AlMgB14is described in this letter as a potential breakthrough in protective coating technology for LIGA microdevices. Nanoindentation tests show that hardness of AlMgB14films prepared by pulsed laser deposition ranges from 45 GPa to 51 GPa, when deposited at room temperature and 573 K, respectively. Extremely low friction coefficients of 0.04-0.05, which are thought to result from a self-lubricating effect, have also been confirmed by nanoscratch tests on the AlMgB14films. Transmission electron microscopy studies show that the as-deposited films are amorphous, regardless of substrate temperature; however, analysis of FTIR spectra suggests that the higher substrate temperature facilitates formation of the B12icosahedral framework, therefore leading to the higher hardness.
REFERENCES:
patent: 6099605 (2000-08-01), Cook et al.
patent: 6432855 (2002-08-01), Cook et al.
patent: 2003/0219605 (2003-11-01), Molian et al.
patent: WO 03/068503 (2003-08-01), None
Molian, Pal., et al., “Nanocrystalline Thin Films of New Ultra-hard Borides for MEMS and Tooling Applications (DMI-0084969),” Manuscript not published 2003; 10 pages; no date given.
U.S. Appl. No. 60/367,338, filed Feb. 14, 2002.
Cherukuri, Ram, et al. “Pulsed laser deposition of A1MgB14on carbide insets for metal cutting” Surface and Coatings Technology 155 (2002) 112-120, no month given.
Molian, Pal., et al. Nanocrystalline Thin Films of New Ultra-hard Borides for MEMS and Tooling Applications (DMI-0084969), Manuscript not published 2003 ( 10 pages); no date given.
Prasad, Somuri, et al. “Tribological coatings for LIGAMENS” Advanced Materials & Processes, Dec. 2002, pp. 30-33.
Constant Alan Paul
Cook Bruce Allan
Harringa Joel Lee
Molian Palaniappa A.
Russell Alan Mark
Iowa State University & Research Foundation, Inc.
McKee Voorhees & Sease, P.L.C.
Zimmerman John J.
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