Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2006-01-31
2006-01-31
Rachuba, M. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S038000, C451S039000, C451S041000, C451S054000, C451S075000, C427S180000, C427S421100, C427S427000
Reexamination Certificate
active
06991515
ABSTRACT:
A ultra fine particle film forming apparatus is provided which is capable of forming a ultra fine particle film which has ultra fine particles sufficiently bonded together, sufficient density, flat surface and uniform density. A planarized ultra fine particle film forming method for forming a planarized ultra fine particle film from a deposited film of ultra fine particles formed by supplying the ultra fine particles to a substrate, the method comprising one or more of a planarizing step of planarizing a surface of the deposited film of the ultra fine particles supplied to the substrate.
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Farber Martin A.
Rachuba M.
Secretary of Agency of Industrial Science and Technology
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