Ultra dark polymer

Details Ultra dark polymer Ultra dark polymer

2005-12-15

2009-10-13

Lee, Sin J. (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Matting or other surface reflectivity altering material

C430S004000, C430S269000, C430S270100, C430S311000, C359S297000, C359S290000, C359S291000, C359S292000, C427S348000, C427S372200, C427S331000

Reexamination Certificate

active

07601486

ABSTRACT:
A method and a material for creating an antireflective coating on an integrated circuit. A preferred embodiment comprises applying a dark polymer material on a reflective surface, curing the dark polymer material, and roughening a top surface of the dark polymer material. The roughening can be achieved by ashing the dark polymer material in an ash chamber. The dark polymer material, preferably a black matrix resin or a polyimide black matrix resin, when ashed in an oxygen rich atmosphere for a short period of time, forms a surface that is capable of absorbing light as well as randomly refracting light it does not absorb. A protective cap layer may be formed on top of the ashed dark polymer material to provide protection for the dark polymer material.

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