Ultra-clean transport carrier

Details Ultra-clean transport carrier Ultra-clean transport carrier

1997-01-21

1998-12-01

Smith, Duane S.

Gas separation

With means facilitating transportability or handling of...

553851, 553852, 55418, 55471, 206710, 454192, B01D 5000

Patent

active

058431969

ABSTRACT:
A transport carrier for transporting x-ray masks, wafers and the like, from an ultra-clean environment to another through a lesser clean environment. The apparatus includes a box that is sealed from the outside by an access door, one or more fans, at least one air filter, rechargeable batteries or a continuous voltage supply for powering the fans. It also includes a damper mechanism for maintaining a positive air pressure when the access door opens. The damper also secures recirculating air inside the box when the door closes. The recirculating air is continuously cleaned at a rate of 2,000 times/minute. The air filter is placed horizontally, preferably, over a frame facing the product to be transported to ensure a continuous smooth, laminar flow.

REFERENCES:
patent: 4037830 (1977-07-01), Poluzzi et al.
patent: 4609103 (1986-09-01), Bimer et al.
patent: 4666479 (1987-05-01), Shoji
patent: 4724874 (1988-02-01), Parikh et al.
patent: 4770680 (1988-09-01), Machida et al.
patent: 4804086 (1989-02-01), Grohrock
patent: 4961766 (1990-10-01), Hogan
patent: 4963069 (1990-10-01), Wurst et al.
patent: 5025924 (1991-06-01), Watanabe
patent: 5219464 (1993-06-01), Yamaga et al.
patent: 5346518 (1994-09-01), Baseman et al.
patent: 5380503 (1995-01-01), Fujii et al.
Anonymous, "Clean Wafer Transportation" Research Disclosure, No. 289, Kenneth Mason Publications Ltd., England, May 1966.

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