UHV rotating fluid delivery system

Details UHV rotating fluid delivery system UHV rotating fluid delivery system

1993-09-02

1995-12-05

Hoang, Tu

Industrial electric heating furnaces

Electron beam furnace device

Vaporizing furnace

21912115, 118726, H01J 37305

Patent

active

054736277

ABSTRACT:
A rotating all metal sealed fluid delivery system for supplying fluid to an apparatus, such as an electron beam source assembly, in an UHV environment includes a housing with fluid inlet and outlet ports therethrough, opposed fluid inlet and outlet lines, an inlet and outlet bellows within the housing, and a turntable mounted in an aperture in the housing for attachment to a rotatable spindle of the apparatus. A ultra high vacuum compression gasket forms an UHV seal between the spindle and the turntable. The bellows are attached at first ends to the inlet and outlet ports, and at opposite ends to the opposed inlet and outlet lines extending to the rotatable apparatus, through the spindle and the turntable into the housing. The bellows are coiled within the housing and separated by a non-abrasive plate. Following attachment to the ports and lines, the entire length of each bellows remains within a single plane during rotation along the same axis as the axis of rotation of the apparatus. As the spindle rotates up to 360.degree., the oppositely wound bellows are moved along the axis of rotation of the spindle where one coils as the other uncoils, all in the same horizontal plane.

REFERENCES:
patent: 4632059 (1986-12-01), Flatscher et al.
patent: 4748935 (1988-06-01), Wegmann
patent: 4866239 (1989-09-01), Egermeier
patent: 4944245 (1990-07-01), Stoessl et al.
patent: 4983806 (1991-01-01), Harper et al.
patent: 5012064 (1991-04-01), Chang et al.
patent: 5338913 (1994-08-01), Finn et al.

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