Two-zone ion beam carbon deposition

Details Two-zone ion beam carbon deposition Two-zone ion beam carbon deposition

2011-08-30

2011-08-30

Kim, Robert (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S42300F, C118S7230AN, C427S523000

Reexamination Certificate

active

08008632

ABSTRACT:
The invention relates an ion source for ion beam deposition comprising multiple anodes, wherein the ion source deposits multiple zones of a source material and thicknesses of at least two of the multiple zones are different.

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