Two-step positioning device using Lorentz forces and a static ga

Details Two-step positioning device using Lorentz forces and a static ga Two-step positioning device using Lorentz forces and a static ga

1990-10-04

1992-06-09

Watson, Robert C.

Work holders

Holder mounted for movement

With plural means for changing holder positions

B23Q 102

Patent

active

051200341

ABSTRACT:
A positioning device includes a table (101, 213) guided by a carriage (15, 199), the carriage (15, 199) being displaceable in two coordinate directions (X, Y) with respect to the base (3) and the table (101, 213) being displaceable with respect to the carriage (15, 199) in the same coordinate directions (X, Y) solely by Lorentz forces, while in a third coordinate direction (Z) the position of the table (101, 213) is determined by a static gas bearing. The two-step positioning device is particularly suitable for use in opto-lithographic devices.

REFERENCES:
patent: 4129291 (1978-12-01), Kato et al.
patent: 4492356 (1985-01-01), Taniguchi et al.
patent: 4630942 (1986-12-01), Tsumaki et al.
patent: 4684315 (1987-08-01), Sugishima et al.
patent: 4887804 (1989-12-01), Ohtsuka

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