Radiant energy – Ionic separation or analysis – With evacuation or sealing means
Patent
1985-11-14
1987-06-09
Anderson, Bruce C.
Radiant energy
Ionic separation or analysis
With evacuation or sealing means
250281, 13763015, 251113, H01J 4904
Patent
active
046722033
ABSTRACT:
A multi-stage valve having a valve housing containing an inlet port and an outlet port that communicate through means of an elongated chamber formed in the housing. An outer sealing unit is mounted in the chamber and is adapted to close in sealing contact against one of the ports. A control orifice is passed through the first sealing unit to restrict the flow through the port when the unit is sealed thereagainst. A second inner sealing unit is mounted in the chamber behind the outer unit and is arranged to close thereagainst to seal the orifice. The two units are coupled by a lost motion mechanism which permits the sealing units to close in sequence between a fully closed position, an intermediate position wherein the flow through the valve is restricted by the orifice and a fully opened position wherein the flow through the valve is unrestricted.
REFERENCES:
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patent: 2888953 (1959-06-01), Gratzmuller
patent: 3211419 (1965-10-01), Klinger-Lohr
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patent: 3572386 (1971-03-01), Sherwin
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patent: 4170892 (1979-10-01), Bailtis
patent: 4172020 (1979-11-01), Tisone et al.
Dennison, Mass Spectrometry Applied to a Reactive Ion Mill, Solid State Tech., Sep. 1980.
Anderson Bruce C.
Guss Paul A.
Inficon Leybold-Heraeus Inc.
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