Two-stage vacuum pump apparatus and method of operating the same

Details Two-stage vacuum pump apparatus and method of operating the same Two-stage vacuum pump apparatus and method of operating the same

1987-03-16

1988-09-13

Freeh, William L.

Pumps

Condition responsive control of pump drive motor

Plural pumps having separate drive motors, supply sources,...

417247, 418 3, 418 9, 418 13, F04B 4900, F04B 4906, F04B 134

Patent

active

047706090

ABSTRACT:
A two-stage vacuum pump apparatus has a first stage of vacuum pump constituted by a screw-type vacuum pump and a second stage vacuum pump constituted by an oil-sealed rotary vacuum pump operative to maintain the back pressure of the first stage vacuum pump at a level ranging from 1 to 100 Torr., whereby a high level of vacuum can be attained in a system to be evacuated without any risk of contamination of the evacuated system by oil. Also disclosed is a method of operating the two-stage vacuum pump apparatus.

REFERENCES:
patent: 2958455 (1960-11-01), Steinherz et al.
patent: 3910731 (1975-10-01), Persson
patent: 3922110 (1975-11-01), Huse
patent: 4068984 (1978-01-01), Spindler
patent: 4225288 (1980-09-01), Mugele
patent: 4283167 (1981-08-01), Bassan
patent: 4487563 (1984-12-01), Mori
patent: 4523897 (1985-06-01), Lower
patent: 4601643 (1986-07-01), Seidel
patent: 4664601 (1987-05-01), Uchida
patent: 4666385 (1987-05-01), Ohamoto

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