Two-stage sealing system for thermally conductive chuck

Details Two-stage sealing system for thermally conductive chuck Two-stage sealing system for thermally conductive chuck

1997-09-26

2000-10-31

Leo, Leonard

Heat exchange

With retainer for removable article

165 802, 156345, 118728, F28F 700

Patent

active

061387452

ABSTRACT:
A chuck having two distinct portions mounts a substrate within a vacuum processing chamber. A first sealing stage confines a gas within a heat-transfer interface between one portion of the chuck and the substrate. A second sealing stage collects gas escaping from the heat-transfer interface within an intermediate space bounded by the two portions of the chuck and the substrate. Pressure in the intermediate space is reduced with respect to pressure at the heat-transfer interface to inhibit leakage of gas from the heat-transfer interface into the vacuum processing chamber.

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