Two-stage positive displacement pump

Pumps – Diverse pumps – Series

Patent

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417521, F04B 2310

Patent

active

055846696

ABSTRACT:
A two-stage positive displacement pump (1) is used in particular to operate in conjunction with a turbomolecular pump (2) that can be placed ahead of it in series. The two-stage positive displacement pump (1) is configured as a hybrid pump (3) that has on the medium-entry side a reciprocating pump (5) with a comparatively large displacement area (6), whereby its piston-cylinder space (7) is sealed off with respect to the crank area (8) by means of a sealing membrane (9). Also as a part of this two-stage positive displacement pump (1) which forms the hybrid pump (3), there is placed in series behind the reciprocating pump (5) a diaphragm pump (10), whose displacement area (11) is noticeably smaller compared to that of the reciprocating pump (5).

REFERENCES:
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English Translation of portions of German Office Action dated Jan. 10, 1994 in couterpart German Priority Application P 43 20 963.7-15.
"LABOVAC.RTM. Linear-Membranpumpen und Kolbenpumpen" Brochure of SASKIA Hochvakuum und Labortechnik GmbH.
"LABOVAC.RTM. D 65-D Dry Trochen Sec" Brochure of SASKIA Hochvakuum und Labortechnik GmbH.

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