Two-stage laser system for aligners

Details Two-stage laser system for aligners Two-stage laser system for aligners

2011-06-07

2011-06-07

Van Roy, Tod T (Department: 2828)

Coherent light generators

Particular resonant cavity

Folded cavity

C372S055000, C372S056000, C372S057000, C372S062000, C372S097000

Reexamination Certificate

active

07957449

ABSTRACT:
The invention relates to a two-stage laser system well fit for semiconductor aligners, which is reduced in terms of spatial coherence while taking advantage of the high stability, high output efficiency and fine line width of the MOPO mode. The two-stage laser system for aligners comprises an oscillation-stage laser (50) and an amplification-stage laser (60). Oscillation laser light having divergence is used as the oscillation-stage laser (50), and the amplification-stage laser (60) comprises a Fabry-Perot etalon resonator made up of an input side mirror (1) and an output side mirror (2). The resonator is configured as a stable resonator.

REFERENCES:
patent: 4689794 (1987-08-01), Brosnan
patent: 5305334 (1994-04-01), Margalit et al.
patent: 5392310 (1995-02-01), Klein
patent: 6173000 (2001-01-01), Balla
patent: 7167499 (2007-01-01), Das et al.
patent: 2002/0064202 (2002-05-01), Sandstrom et al.
patent: 2004/0202220 (2004-10-01), Hua et al.
patent: 2006/0126697 (2006-06-01), Knowles et al.
patent: 2-130990 (1990-05-01), None
patent: 11-121879 (1999-04-01), None
M.S. Dzhidzhoev et al, Regenerative amplification of narrow-band radiation in an XeCL excimer laser, Sov.J, Quantum Electron. 20 (6), Jun. 1990, pp. 618-624.
Masakatsu Sugii et al, High locking efficiency XeCI ring amplifier injection locked by backward stimulated Brillouin scattering, J. Appl. Phys. 62 (8), Oct. 15, 1987 pp. 3480-3482.
Thomas J. Pacala et al, A wavelength scannable XeCI oscillator-ring amplifier laser system, Appl. Phys. Lett. 40(1), Jan. 1, 1982, pp. 1-3.
J. C. White et al, Tunable ArF excimer-laser source, Optics Letters vol. 6, No. 6, Jun. 1981, pp. 293-294.
Julius Goldhar et al, An Efficient Double-Pass Raman Amplifier with Pump Intensity Averaging in a Light Guide, IEEE Journal of Quantum Electronics, vol. Qe-20, No. 7, Jul. 1984, pp. 772-785.

Affiliated with

Also associated with

Rating

Two-stage laser system for aligners does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Two-stage laser system for aligners, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Two-stage laser system for aligners will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2657515