Two-part field emission structure

Details Two-part field emission structure Two-part field emission structure

1997-09-19

1999-10-19

Patel, Vip

Electric lamp and discharge devices

With luminescent solid or liquid material

Vacuum-type tube

313309, H01J 902

Patent

active

059694734

ABSTRACT:
A two-part field emission structure, and a method for making such a structure, is described. A substrate is provided having a first conductive layer thereon, a first insulating layer over the first conductive layer, a second conductive layer over the first insulating layer, and an opening formed in the first insulating and second conductive layers. A sacrificial layer is formed over the second conductive layer. A bottom portion of the field emitter structure is formed in the opening, by vertical deposition of a conductive material, whereby a third conductive layer, having a collimated channel over the bottom portion, is formed over the sacrificial layer. The formation of the field emitter structure is completed by vertical deposition of a tip material on to the top of the bottom portion of the field emitter structure, whereby a top conductive layer is formed over the third conductive layer. Lastly, the sacrificial layer, the third conductive layer, and the top conductive layer are removed. An optional interface adhesion layer is formed between the bottom portion of the field emitter structure and the tip.

REFERENCES:
patent: 3755704 (1973-08-01), Spindt et al.
patent: 5064396 (1991-11-01), Spindt
patent: 5258685 (1993-11-01), Jaskie et al.
patent: 5341006 (1994-08-01), Kumar
patent: 5341063 (1994-08-01), Kumar
patent: 5451830 (1995-09-01), Huang
patent: 5469014 (1995-11-01), Itoh et al.
patent: 5635790 (1997-07-01), Meyer et al.
patent: 5773920 (1998-06-01), Shaw et al.

Affiliated with

Also associated with

Rating

Two-part field emission structure does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Two-part field emission structure, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Two-part field emission structure will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2060226