Two level end effector

Details Two level end effector Two level end effector

2006-09-12

2006-09-12

Kramer, Dean J. (Department: 3652)

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

C294S001200, C414S941000

Reexamination Certificate

active

07104578

ABSTRACT:
An end effector alternately (or simultaneously) transports susceptors and wafers. Separate contact surfaces are provided for wafer transport and for susceptor transport. In one embodiment, the wafer contact surface is spaced above the susceptor contact surface, and the susceptor is a plate with a recess sized and deep enough to accommodate the wafer contact surface without touching it, while being supported upon the susceptor contact surface. The wafer contact surface is a complete or C-shaped ring having an annular opening connected to a vacuum pump. In another embodiment, the wafer contact surface is spaced below the susceptor contact surface, and both comprise peripheral edge support surfaces. The edge support surfaces can be formed from a single sloped surface for each contact pad, with a smaller wafer supported below the position of a larger susceptor plate. Alternatively, a stepped surface is provided for each pad, with the lower inner contact surfaces supporting a wafer and the upper outer contact surfaces supporting the susceptor.

REFERENCES:
patent: 3466079 (1969-09-01), Mammel
patent: 3523706 (1970-08-01), Logue
patent: 3947236 (1976-03-01), Lasch, Jr.
patent: 4348044 (1982-09-01), Wood, III
patent: 4468259 (1984-08-01), Mimura
patent: 4495024 (1985-01-01), Bok
patent: 4575408 (1986-03-01), Bok
patent: 4586743 (1986-05-01), Edwards et al.
patent: 4738748 (1988-04-01), Kisa
patent: 4773687 (1988-09-01), Bush et al.
patent: 4852247 (1989-08-01), Hawkswell
patent: 4860687 (1989-08-01), Frijlink
patent: 4900214 (1990-02-01), Ben
patent: 4904012 (1990-02-01), Nishiguchi et al.
patent: 4913481 (1990-04-01), Chin et al.
patent: 4923054 (1990-05-01), Ohtani et al.
patent: 4971512 (1990-11-01), Lee et al.
patent: 5022695 (1991-06-01), Ayers
patent: 5133635 (1992-07-01), Malin et al.
patent: 5162047 (1992-11-01), Wada et al.
patent: 5445486 (1995-08-01), Kitayama et al.
patent: 5520501 (1996-05-01), Kouno et al.
patent: 5565034 (1996-10-01), Nanbu et al.
patent: 5592581 (1997-01-01), Okase
patent: 5669752 (1997-09-01), Moon
patent: 5692873 (1997-12-01), Weeks et al.
patent: 5711811 (1998-01-01), Suntola et al.
patent: 5746460 (1998-05-01), Marohl et al.
patent: 5762391 (1998-06-01), Sumnitsch
patent: 5765889 (1998-06-01), Nam et al.
patent: 5788425 (1998-08-01), Skow et al.
patent: 5788453 (1998-08-01), Donde et al.
patent: 5820367 (1998-10-01), Osawa
patent: 5833288 (1998-11-01), Itasaka
patent: 5839770 (1998-11-01), Zajac, Jr. et al.
patent: 5851041 (1998-12-01), Anderson et al.
patent: 5879459 (1999-03-01), Gadgil et al.
patent: 5897311 (1999-04-01), Nishi
patent: 5931518 (1999-08-01), Pirker
patent: 5983906 (1999-11-01), Zhao et al.
patent: 5984607 (1999-11-01), Oosawa et al.
patent: 5990650 (1999-11-01), Brock
patent: 6062853 (2000-05-01), Shimazu et al.
patent: 6068441 (2000-05-01), Raaijmakers et al.
patent: 6109677 (2000-08-01), Anthony
patent: 6111225 (2000-08-01), Ohkase et al.
patent: 6152677 (2000-11-01), Tateyama et al.
patent: 6158951 (2000-12-01), Carr et al.
patent: 6167322 (2000-12-01), Holbrooks
patent: 6168668 (2001-01-01), Yudovsky
patent: 6183183 (2001-02-01), Goodwin et al.
patent: 6189943 (2001-02-01), Manpuku et al.
patent: 6204194 (2001-03-01), Takagi
patent: 6244641 (2001-06-01), Szapucki et al.
patent: 6279976 (2001-08-01), Ball
patent: 6280183 (2001-08-01), Mayur et al.
patent: 6322116 (2001-11-01), Stevens
patent: 6331023 (2001-12-01), Goodwin et al.
patent: 6347919 (2002-02-01), Ryan et al.
patent: 6368049 (2002-04-01), Osaka et al.
patent: 6399922 (2002-06-01), Okase et al.
patent: 6409453 (2002-06-01), Brodine et al.
patent: 6462411 (2002-10-01), Watanabe et al.
patent: 6559039 (2003-05-01), Wang et al.
patent: 2002/0071756 (2002-06-01), Gonzalez
patent: 0 405 301 (1991-01-01), None
patent: 0 821 403 (1998-01-01), None
patent: 2 199 022 (1988-06-01), None
patent: 63-136532 (1988-08-01), None
patent: 10-163297 (1998-06-01), None
patent: WO 98/01890 (1998-01-01), None
patent: WO 99/18601 (1999-04-01), None
Provisional specification for 300-mm Front-opening Interface Mechanical Standard (FIMS), SEMI E62-0997, pp. 1-10.
“Asyst Axys 407 Class 1 Robot”, Asyst Technologies, Inc., Mar. 2000.
“Asyst Model 53 Robot,”Asyst Technologies, Inc. 2002.
“4.5 Vacuum Robot,” Asyste Technologies, Inc. 2002.
“Provisional mechanical specification for a 300 mm single-wafer box system that emulates a foup,” SEMI E103-1000 2000, pp. 1-4.
“Edge Gripping End-Effector,” www.ideworld.com, Jul. 24, 2002.

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