Two grating lateral shearing wavefront sensor

Details Two grating lateral shearing wavefront sensor Two grating lateral shearing wavefront sensor

2011-02-15

2011-02-15

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

Having shearing

C356S521000, C250S23700G

Reexamination Certificate

active

07889356

ABSTRACT:
Methods include simultaneously diffracting a beam in a first direction and a second direction orthogonal to the first direction to form a once-diffracted beam, where the beam comprises a wavefront shaped by a test object, simultaneously diffracting the once-diffracted beam in orthogonal directions to form a twice-diffracted beam, overlapping at least two orders of the twice-diffracted beam in each direction to form an interference pattern at a detector, the interference pattern being formed by multiple copies of the wavefront laterally sheared in the first direction and multiple copies of the wavefront laterally sheared in the second direction; and determining information about the wavefront based on the interference pattern.

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International Search Report issued on Jul. 20, 2010, for the corresponding PCT Application No. PCT/US2009/067189, filed Dec. 8, 2009.

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