Two-element semiconductor capacitive acceleration sensor

Details Two-element semiconductor capacitive acceleration sensor Two-element semiconductor capacitive acceleration sensor

1995-08-21

1997-04-22

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 15125

Patent

active

056230990

ABSTRACT:
This invention concerns a capacitive acceleration sensor complete with planar build-up, in particular for use as a component part of a vehicle occupant protection system within a motor vehicle. A self-supporting structure will be movably located within a hollow space between two semiconductor elements which are electrically insulated from each other but mechanically bonded, where an acceleration force acting on the inert mass of the self-supporting structure will cause a change in the distance between this self-supporting structure and the semiconductor element. This produces a change in capacity which can be evaluated by means of suitable circuitry.

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Y. Matsumoto and M. Esashi, "Integrated Silicon Capacitive Accelerometer With PLL Servo Technique", Sensors and Actuators, A. 39, 1993, 209-217.
Yoshihiro Yokota, "Acceleration Sensor, Air Bag Apparatus and Body Controller Using the Same", Patent Abstracts of Japan, P-1677 Jan. 18, 1994, vol. 18/No. 31.

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