Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1997-06-18
1998-09-29
Mathews, A. A.
Photocopying
Projection printing and copying cameras
Step and repeat
355 72, 269 73, G03B 2742, G03B 2753
Patent
active
058152466
ABSTRACT:
A positioning device with a base and a displaceable unit which is displaceable relative to the base parallel to an X-direction and parallel to a Y-direction by means of an X-actuator and a Y-actuator. The X-actuator and the Y-actuator each have a first part which is coupled to the displaceable unit, seen parallel to the X-direction and Y-direction, respectively, and a second part which is coupled to a common balancing unit, seen parallel to the X-direction and the Y-direction, respectively, which balancing unit is displaceably guided parallel to the X-direction and to the Y-direction along a guide which extends parallel to the X-direction and the Y-direction and which is fastened to the base. During operation the first parts of the X-actuator and the Y-actuator exert on the second parts reaction forces which are directed parallel to the X-direction and to the Y-direction, respectively, whereby the common balancing unit is displaced parallel to the X-direction and the Y-direction, respectively. It is prevented thereby that the reaction forces are transmitted into the base, so that mechanical vibrations of the base are reduced. In a special embodiment, the balancing unit comprises a support body which comprises a surface which extends parallel to the X-direction and the Y-direction and along which the displaceable unit is guided. The positioning device can be used for the displacement and positioning of a substrate holder in a lithographic device for the manufacture of semiconductor substrates.
REFERENCES:
patent: 5150153 (1992-09-01), Franken et al.
patent: 5208497 (1993-05-01), Ishii et al.
patent: 5446519 (1995-08-01), Makinouchi
patent: 5623853 (1997-04-01), Novak et al.
Janssen Henricus W. A.
Sperling Frank B.
Mathews A. A.
U.S. Philips Corporation
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