Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2006-08-29
2006-08-29
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
C430S022000, C430S030000, C257S797000, C438S401000
Reexamination Certificate
active
07099010
ABSTRACT:
A two-dimensional periodic pattern that is symmetrical with respect to a first and a second direction allows the determination of an overlay accuracy that is obtained during the fabrication of the two-dimensional structure. Due to the symmetry of the structure, the overlay accuracy in the first direction may be determined on the basis of substantially the same reference data as used for the determination of the overlay accuracy of the second direction so that establishing libraries is simplified. Moreover, depending on the capability of the metrology tool, the overlay accuracy in both directions may be obtained simultaneously.
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Advanced Micro Devices , Inc.
Lauchman Layla G.
Stock, Jr. Gordon J.
Williams Morgan & Amerson P.C.
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