Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate
2005-03-29
2005-03-29
Nguyen, Kiet T. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
With detector
C250S492210
Reexamination Certificate
active
06872953
ABSTRACT:
An ion beam uniformity detector of the present invention includes a number of horizontal rods and a number of vertical rods placed on parallel planes and separated by a selected distance. Crossover measurement points are defined by intersections of the horizontal and vertical rods. By selectively and sequentially applying a pulse to the vertical rods and concurrently biasing horizontal rods, measurements can be obtained for the crossover measurement points, which can then be employed to determine ion beam shape and ion beam intensity at the crossover measurement points. Based on these measurements, adjustments can be made to a continuing ion implantation process in order to increase uniformity with respect to intensity as well as to provide a desired beam shape. Additionally, pairs of vertical and horizontal rods can be employed to also obtain measurements that indicate angle of incidence in two dimensions at the various crossover points.
REFERENCES:
patent: 3989946 (1976-11-01), Chapman et al.
patent: 5198676 (1993-03-01), Benveniste et al.
patent: 5218210 (1993-06-01), McIntyre, Jr. et al.
patent: 6677598 (2004-01-01), Benveniste
Axcelis Technologies Inc.
Eschweiler & Associates LLC
Nguyen Kiet T.
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