Two dimensional spatial light modulator

Details Two dimensional spatial light modulator Two dimensional spatial light modulator

2006-06-20

2006-06-20

Dang, Hung (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C359S295000

Reexamination Certificate

active

07064883

ABSTRACT:
A spatial light modulator is provided having a two-dimensional (2D), close-packed MEMS (Micro-Electromechanical System) array of diffractive pixels. Each pixel includes a number of diffractive elements or diffractors. Each diffractor includes a tent member disposed above and spaced apart from an upper surface of a substrate, a movable actuator disposed between the substrate and the tent member, and a driver moving the actuator. The tent member has a first planar light reflective surface facing away from the substrate, the first planar light reflective surface having an aperture formed therein. The actuator has a second planar light reflective surface parallel to and potentially coplanar with the first planar light reflective surface and positioned relative to the aperture to receive light passing therethrough. The aperture may be sized and shaped to define an area with reflectivity substantially equal to the reflectivity of an area of the first planar light reflective surface surrounding the aperture to provide a maximum contrast ratio.

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