Two-dimensional scanning photo-electric microscope

Details Two-dimensional scanning photo-electric microscope Two-dimensional scanning photo-electric microscope

1986-03-26

1988-03-29

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356444, G01N 2100

Patent

active

047345780

ABSTRACT:
A scanning type optical microscope comprising a pair of light deflectors disposed between a laser light source and an objective lens for performing two-dimensional scanning of an object requiring observation by varying the incidence angle of a light entering the objective lens, and a pair of split detectors receiving a light coming from said object, wherein the light deflectors are disposed at the position of the pupil of the objective lens or at a position conjugate therewith or in their vicinity. This microscope has a high resolving power and allows an easy performance of a special microscopy and is convenient to handle. The paired detectors are arranged to be rotatable about an optical axis and allows free alteration of the orientation of differentiation of the differential observation image. A light-blocking plate can be provided within the detecting optical system for removing O-order diffraction light contained in the detection light, whereby permitting dark field microscopy at a very low cost.

REFERENCES:
patent: 3013467 (1961-12-01), Minsky
patent: 3705755 (1972-12-01), Baer
patent: 4318582 (1982-03-01), Minoura et al.
patent: 4329012 (1982-05-01), Minoura et al.
patent: 4455485 (1984-06-01), Hosaka et al.
patent: 4634876 (1987-01-01), Ayata

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