Electricity: motive power systems – Positional servo systems – With particular motor control system responsive to the...
Patent
1983-04-01
1985-08-13
Shoop, Jr., William M.
Electricity: motive power systems
Positional servo systems
With particular motor control system responsive to the...
318135, G05B 1100
Patent
active
045352780
ABSTRACT:
A precision positioning device particularly adapted for use in a semiconductor manufacturing operation is provided which comprises a loading table, an armature and a two-dimensional current-motion converter having a magnetic field group and a first coil group. The magnetic field group is formed from a plurality of magnetic fields disposed on a plane in a two-dimensional array. The centers of the magnetic fields of the array are separated by an equal period. The magnetic fields of the array are disposed perpendicular to the plane and adjacent magnetic fields are directed in alternate directions. The first coil group comprises at least first, second, third and fourth coils having a fixed dimensional relationship. More particularly, each coil is provided with an outer dimension approximately equal to three halves of the magnetic fields and a coil width approximately equal to one-half of the period of the array. The four coils are separated along the plane by separation distances which equal an odd multiple of approximately one-half of the period of the array of magnetic fields.
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Proceedings of the 4th Intersociety Energy Conversion Engineering Conference, Washington, D.C., USA, Sep. 22-26, 1969.
Conference: Proceedings of Southeastern, Roanoke, VA, USA, Apr. 1-4, 1979.
Bergmann Saul M.
Shoop Jr. William M.
Telmec Co., Ltd.
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