Electricity: motive power systems – Linear-movement motors
Patent
1984-10-10
1986-12-02
Shoop, Jr., William M.
Electricity: motive power systems
Linear-movement motors
318687, 310 12, H02K 4100
Patent
active
046267492
ABSTRACT:
A plurality of coil sets are movably positioned in a plurality of magnetic fields which are arranged in a two-dimensional array. The magnetic fields periodically vary in strength and polarity along the two-dimensional array. The coil sets drive a loading table in the X and Y axes under the control of currents applied thereto.
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Keane Patrick C.
Shoop Jr. William M.
Tokyo Electron Limited
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