Two-dimensional positioning device

Electricity: motive power systems – Linear-movement motors

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318687, 310 12, H02K 4100

Patent

active

046267492

ABSTRACT:
A plurality of coil sets are movably positioned in a plurality of magnetic fields which are arranged in a two-dimensional array. The magnetic fields periodically vary in strength and polarity along the two-dimensional array. The coil sets drive a loading table in the X and Y axes under the control of currents applied thereto.

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