Two-dimensional position/orientation measuring mark, two-dimensi

Details Two-dimensional position/orientation measuring mark, two-dimensi Two-dimensional position/orientation measuring mark, two-dimensi

1996-08-05

1999-05-04

Hafiz, Tariq R.

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Earth science

702150, 901 47, B01B 1100

Patent

active

059012730

ABSTRACT:
A mark is provided on an object surface of an object under measurement, and the mark provides two intersection points P.sub.1 and P.sub.2 between first and second straight lines L.sub.1, L.sub.2, and between second and third lines L.sub.2, L.sub.3, in which an angle ".alpha." defined by the first and second straight lines L.sub.1 and L.sub.2, another angle ".beta." defined by the second and third straight lines L.sub.2 and L.sub.3, and a distance between P.sub.1 and P.sub.2 are known. This mark is imaged on at least one set of one-dimensional optical sensor. When a sensor signal having a light intensity distribution along a longitudinal direction is outputted from the one-directional optical sensor, a calculation unit calculates positions of the straight lines L.sub.1 to L.sub.3 of the mark image on the one-dimensional optical sensor in response to the sensor signal. Based upon this calculation result, another calculation is made of at least one position of the two intersection points P.sub.1 and P.sub.2, and also an inclination of at least one straight line among the straight lines L.sub.1 to L.sub.3. For instance, this calculation result is used as a reference point for measuring the position of the object under measurement, and also a reference line for measuring the orientation thereof.

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