Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1989-09-11
1991-03-12
Willis, Davis L.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356363, G01B 902
Patent
active
049988239
ABSTRACT:
A two-dimensional position detecting method detects a two-dimensional position of an object which has a diffraction grating provided thereon, and this diffraction grating comprises a first grating portion which extends in a first direction and a second grating portion which extends in a second direction which is perpendicular to the first direction. The two-dimensional position detecting method scans the first grating portion of the diffraction grating in the second direction by a coherent light and detects by a photosensor an mth order spectrum which is generated by a diffraction of the coherent light caused by the first grating portion, where m is an integer, and scans the second grating portion of the diffraction grating in the first direction by the coherent light and detects by the photosensor a zero order spectrum which is generated by a diffraction of the coherent light caused by the second grating portion, to thereby detect the two-dimensional position at an intersection of the first and second grating portions of the diffraction grating.
REFERENCES:
patent: 4600309 (1986-07-01), Fay
patent: 4815854 (1989-03-01), Tanaka et al.
Fujitsu Limited
Koren Matthew W.
Willis Davis L.
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