Two-dimensional optical scatterometer apparatus and process

Details Two-dimensional optical scatterometer apparatus and process Two-dimensional optical scatterometer apparatus and process

1990-10-01

1993-08-31

McGraw, Vincent P.

Optics: measuring and testing

Of light reflection

356446, G01N 2147

Patent

active

052413691

ABSTRACT:
An optical scatterometer system includes a screen positioned to receive and display a pattern representative of light specularly reflected and scattered from an illuminated sample material and a camera positioned to record the pattern displayed on the screen. The screen may present a curved surface to increase its light gathering capabilities and may be constructed of an electron trapping material, a photochromic material or a pyrochromic material. The screen may contain one or more apertures for passing one or more incident light beams generated by a light source and/or light specularly reflected and scattered from the sample material. The screen may be positioned between the sample material and the light source, or the sample material may be positioned between the screen and the light source.

REFERENCES:
patent: 2803161 (1957-08-01), Summerhayes
patent: 3424912 (1969-01-01), Sargent
patent: 4547073 (1985-10-01), Kugimiya
patent: 4555635 (1985-01-01), Yoshida

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