Two-dimensional nanopositioner with crude and fine stages

Details Two-dimensional nanopositioner with crude and fine stages Two-dimensional nanopositioner with crude and fine stages

2003-05-03

2009-10-20

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

Position or displacement

C310S012060, C310S026000

Reexamination Certificate

active

07605928

ABSTRACT:
The invention relates to accurate positioning devices which make it possible to displace an object within a nanometric range. The device includes a fixed foundation element (FE) provided with fine and crude positioning steps which are arranged thereon in such a way that they are reciprocatingly movable. The crude positioning step is kinematically connected to the FE and to the fine positioning step in such a way that they are synchronously movable with respect to the FE. The kinetic connection of the steps is embodied in such a way that the fine positioning step is autonomously movable with respect to the crude positioning step. Said steps are disposed in such a way that they are autonomously movable with respect to the FE and with respect to each other along two reference axes. The crude positioning step is embodied in a form of a rigid supporting plate, the fine positioning step being embodied in the form of a rectangular frame which is rigidly fixed to the plate. An executing mounting element is arranged inside the frame in such a way that it is movable and/or fixable in a specified position by nanometric positioning elements which are arranged on each side of the frame.

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