Two-dimensional imaging with line arrays

Details Two-dimensional imaging with line arrays Two-dimensional imaging with line arrays

1984-05-07

1987-01-13

Willis, Davis L.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356363, G01B 1100

Patent

active

046360808

ABSTRACT:
One or two linear arrays of photodetectors are combined with optical elements to form an arrangement capable of determining the X-Y location of a focused laser beam or other light spot. The resulting arrangement is characterized by low cost and by excellent resolution, stability and linearity. Moreover, the arrangement provides output data that can be easily and quickly processed. The combination is adapted, for example, for use with zone plates in aligning masks and wafers in semiconductor fabrication.

REFERENCES:
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patent: 4207002 (1980-06-01), Gara et al.
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patent: 4341472 (1982-07-01), Gorog et al.
patent: 4350443 (1982-09-01), Williamson
patent: 4398824 (1983-08-01), Feldman et al.
patent: 4531060 (1985-07-01), Suwa et al.

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