Two dimensional driving device for use in a positioning device i

Details Two dimensional driving device for use in a positioning device i Two dimensional driving device for use in a positioning device i

1983-04-04

1985-11-26

Dobeck, B.

Electricity: motive power systems

Linear-movement motors

318574, 318575, 318603, 310 12, H02K 4100

Patent

active

045556504

ABSTRACT:
A device for positioning a semiconductor substrate is provided comprising magnetic field group formed from a plurality of magnetic fields disposed on a plane in a two-dimensional array. The magnetic fields are provided with a perpendicular orientation relative to the plane and adjacent magnetic fields are directed in alternate directions. Coil sets are formed of a plurality of coils, the coils having a specific dimensional relationship with the magnetic field array. Coil groups are formed by fixedly securing a plurality of these coil sets to each other the coil groups being disposed within the magnetic field group so as to be freely movable along the plane. Electric current is applied to the coils which generates a force in each coil set so as to move the coil set in either one of the longitudinal and lateral directions of the array of magnetic fields, whereby a current-motion converter and a driving device making use of the converter can be formed.

REFERENCES:
patent: 3376578 (1968-04-01), Sawyer
patent: 3878411 (1975-04-01), Nocito et al.
patent: 4187453 (1980-02-01), Rough
Proceedings of the 4th Intersociety Energy Conversion Engineering Conference, Washington, D.C., USA, 22-26, Sep. 1969.
Conference: Proceedings of Southeastcon, Roanoke, Va, USA, 1-4, Apr. 1979.

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