Machine element or mechanism – Control lever and linkage systems – Multiple controlling elements for single controlled element
Reexamination Certificate
2000-02-10
2001-12-11
Herrmann, Allan D. (Department: 3682)
Machine element or mechanism
Control lever and linkage systems
Multiple controlling elements for single controlled element
C033S0010MP, C074S089330, C108S143000, C248S657000, C248S661000, C384S045000
Reexamination Certificate
active
06327929
ABSTRACT:
BACKGROUND OF THE INVENTION
The present invention relates to a two dimensional drive system.
An X-Y table, which is an example of conventional two-dimensional drive system, comprises: a base; an X-driving unit being arranged in an X-direction, fixed to the base, and capable of moving an X-moving body, in the X-direction, by an X-driving means; a Y-driving unit being arranged in a Y-direction, fixed to the X-moving body, moved together with the X-moving body in the X-direction, and capable of moving a Y-moving body, in a Y-direction, by a Y-driving means; and a top table being fixed on the Y-moving body.
In the conventional X-Y table, the top table, which is fixed to the Y-moving body, is directly moved, in the Y-direction, by the Y-driving means; the top table is indirectly moved, in the X-direction, by moving the Y-driving unit by the X-driving means.
A first point of the X-driving means, at which driving force of the X-driving means, which moves the Y-driving unit in the X-direction, is generated, and a second point, to which the driving force thereof works so as to move the Y-driving unit in the X-direction, in the top table, are separated. By the distance between the first and second points, moment is generated in the system and it badly influences positioning accuracy, resolution, inertia reductively and high speed operation ability.
In the conventional X-Y table, the Y-driving unit is piled on the X-driving unit, further the top table is piled on the Y-driving unit. With this structure, the weight of the top table fully works to the Y-driving unit, so that the Y-driving unit is bent and the positioning accuracy, etc. are made lower.
The inventor of the present invention invented a two dimensional drive system, and it was disclosed in Japanese Patent Gazette No. 5-92376, in which a moving body (slider) is moved in a first (X) direction and a second (Y) direction, which is perpendicular to the first (X) direction, by two ball screws.
The conventional two-dimensional drive system is shown in FIG.
10
. The system comprises: a base
110
; a pair of X-guides
114
a
and
114
b
being fixed to the base
110
and arranged in the X-direction; a pair of Y-guides
126
a
and
126
b
being fixed to the base
110
and arranged in the Y-direction; a pair of X-travelers
116
a
and
116
b
being capable of moving, in the X-direction, along the X-guides
114
a
and
114
b
; a pair of Y-travelers
128
a
and
128
b
being capable of moving, in the Y-direction, along the Y-guides
126
a
and
126
b
; an X-ball screw
134
being arranged in the X-direction and spinably spanned between the Y-travelers
128
a
and
128
b
; a Y-ball screw
138
being arranged in the Y-direction and spinnably spanned between the X-travelers
116
a
and
116
b
; a slider
142
being screwed with the X- and Y-ball screws
134
and
138
and capable of moving in the X- and Y-directions when the X-and Y-ball screws
134
and
138
spin; an X-servo motor
136
for spinning the X-ball screw
134
; a Y-servo motor
140
for spinning the Y-ball screw
138
; a pair of X-racks
112
a
and
112
b
being arrange, in the X-direction, alongside the X-guides
114
a
and
114
b
; a pair of Y-racks
124
a
and
124
b
being arrange, in the Y-direction, along side the Y-guides
126
a
and
126
b
; an X-rod
132
being rotatably arranged in the X-direction and capable of moving, in the Y-direction, with the movement of the Y-travellers
128
a
and
128
b
; a Y-rod
120
being rotatably arranged in the Y-direction and capable of moving, in the X-direction, with the movement of the X-travellers
116
a
and
116
b
; a pair of X-pinion gears
133
a
and
133
b
being coaxially fixed to the X-rod
132
, respectively engaged with the Y-racks
124
a
and
124
b
and capable of rolling, in the Y-direction, with the movement of the X-rod
132
; and a pair of Y-pinion gears
122
a
and
122
b
being coaxially fixed to the Y-rod
120
, respectively engaged with the X-racks
112
a
and
112
b
and capable of rolling, in the X-direction, with the movement of the Y-rod
120
.
In the two dimensional drive system, the slider
142
, which corresponds to the top table of the X-Y table, can be directly moved, in the X- and Y-directions, by the X- and Y-ball screws
134
and
138
. Namely, the first point and the second point are met and the slider
142
can be directly driven by the ball screws
134
and
138
, so that the resolution of the ball screws
134
and
138
can be directly mirrored to the resolution of the slider
142
. Namely, the positioning accuracy, etc. of the slider
142
can be improved.
The slider
142
is supported by not only the guides
114
a
,
114
b
,
126
a
and
126
b
but also an X-slider guide
130
and a Y-slider guide
118
. With this structure, deformation of the beam-shaped slider guides
130
and
118
can be limited, so that the positioning accuracy, etc. can be improved.
Further, the slider
142
can be moved in a hollow space, an operator can efficiently work in the hollow space.
However, in the case of using the two-dimensional drive system as an X-Y table, the slider guides
118
and
130
are bent and a level of the slider
142
is made lower, if a heavy thing is mounted onto the slider
142
. If the level of the slider
142
is made lower, the positioning accuracy, etc. of the drive system is made lower.
On the other hand, in the conventional X-Y table, the X-driving unit is fixed to the base, and manufacturing accuracy of a surface of the base influences to the positioning accuracy of the top table. Thus, the positioning accuracy of the X-Y table cannot be improved without improving the manufacturing accuracy of the surface of the base.
SUMMARY OF THE INVENTION
An object of the present invention is to provide a two-dimensional drive system, which is capable of properly supporting a load applied to a slider and improving the positioning accuracy, the resolution, the inertia reductively, the high speed ability, etc.
Another object of the present invention is to provide a two dimensional drive system, which is capable of improving the positioning accuracy of the slider without improving the manufacturing accuracy and capable of reducing manufacturing cost.
To achieve the objects, the two dimensional drive system of the present invention comprises:
a base;
a pair of first fixed guides being fixed to the base and arranged parallel in a first direction;
a pair of second fixed guides being fixed to the base and arranged parallel in a second direction perpendicular to the first direction;
a first moving beam being parallel to the second fixed guides, both ends of the first moving beam being respectively slidably connected to the first fixed guides, whereby the first moving beam can be moved in the first direction;
a second moving beam being parallel to the first fixed guides, the second moving beam being located on the outer side of the first moving beam with respect to the base, both ends of the second moving beam being respectively slidably connected to the second fixed guides, whereby the second moving beam can be moved in the second direction;
a slider being located on the outer side of the first moving beam with respect to the base, the slider being slidably connected to the first and second moving beams, whereby the slider can be moved, in the second direction, along the first moving beam and moved, in the first direction, along the second moving beam;
a first ball screw being spinnably provided to the second moving beam and arranged in the first direction, the first ball screw being screwed with the slider so as to move the slider in first direction;
a second ball screw being spinnably provided to the first moving beam and arranged in the second direction, the second ball screw being screwed with the slider so as to move the slider in second direction;
first driving means for spinning the first ball screw;
second driving means for spinning the second ball screw; and
a third fixed guide being fixed to the base, the third fixed guide being arranged parallel to and between the first fixed guides, the third fi
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