Two dimensional beam deflector

Details Two dimensional beam deflector Two dimensional beam deflector

2008-03-21

2010-11-02

Pham, Hoa Q (Department: 2886)

Optics: measuring and testing

Dimension

Thickness

C356S369000, C359S202100

Reissue Patent

active

RE041906

ABSTRACT:
A two dimensional beam deflector is disclosed which deflects beams from multiple optical assemblies. The input of beams of the multiple optical assemblies follow parallel optical paths until deflection to a wafer. An ellipsometer using a two-dimensional beam deflector is also disclosed.

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