Two-dimensional beam deflector

Details Two-dimensional beam deflector Two-dimensional beam deflector

2008-04-08

2008-04-08

Pham, Hoa Q. (Department: 2886)

Optics: measuring and testing

Dimension

Thickness

C356S369000

Reissue Patent

active

10284308

ABSTRACT:
A two dimensional beam deflector is disclosed which deflects beams from multiple optical assemblies. The input of beams of the multiple optical assemblies follow parallel optical paths until deflection to a wafer. An ellipsometer using a two-dimensional beam deflector is also disclosed.

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