Two-dimensional beam deflector

Optics: measuring and testing – Dimension – Thickness

Reissue Patent

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Details

C356S369000

Reissue Patent

active

10284308

ABSTRACT:
A two dimensional beam deflector is disclosed which deflects beams from multiple optical assemblies. The input of beams of the multiple optical assemblies follow parallel optical paths until deflection to a wafer. An ellipsometer using a two-dimensional beam deflector is also disclosed.

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