Two-dimensional array ultrasonic transducers

Communications – electrical: acoustic wave systems and devices – Signal transducers

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367155, 310334, 310336, 12866203, H04R 1700

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active

053294963

ABSTRACT:
A piezoelectric transducer chip comprising a plurality of transducer elements arranged in a two-dimensional array is disclosed. At least one of the transducer elements is a multi-layer element which comprises a plurality of piezoelectric layers, each of which is separated from the adjacent piezoelectric layers by an electrode layer so that a plurality of capacitive elements is electrically connected in parallel. A first via connects a first set of alternating electrode layers, and a second via connects a second set of alternating electrode layers. The first via is insulated from the second set of alternating electrode layers, and the second via is insulated from the first set of alternating electrode layers. At least one of the plurality of multi-layer elements has an internal edge. At least one of the vias of a multi-layer element is an internal via. Also disclosed are an ultrasonic transducer which includes such a piezoelectric chip, and an ultrasonic scanner which includes such a transducer.

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