Two dimensional array infrared ray image pickup device

Details Two dimensional array infrared ray image pickup device Two dimensional array infrared ray image pickup device

1994-11-25

1996-07-30

Hannaher, Constantine

Radiant energy

Infrared-to-visible imaging

Including detector array

250330, 2503384, 25037008, 2503381, H01L 3100, G01J 508

Patent

active

055414125

ABSTRACT:
An infrared ray image pickup device has a two-dimensional array structure having a sensor substrate, a plurality of scanning circuits provided to form two dimensional arrays on a surface of the substrate, a layer having a plurality of cavities provided over the scanning circuits, a plurality of beams provided to extend over the cavities, each of the beams including an element for converting a temperature variation to an electric signal, a supporting element provided on a peripheral region of the substrate for supporting a lens substrate including a plurality of micro-lenses that are located to face the beams so that a convex portion of each of the micro-lenses is spaced from a top of each of the beams by the same distance as a focal distance of the micro-lenses. The supporting element may have a plurality of convex portions made of boron phosphate silicate glass or boron silicate glass. Alternatively, the supporting element may include a plurality of bearings provided on a packaging substrate and bonding agents surrounding the bearings, the packaging substrate being provided thereon with the sensor substrate.

REFERENCES:
patent: 5049752 (1991-09-01), Kalaf et al.
patent: 5286976 (1994-02-01), Cole
patent: 5293036 (1994-03-01), Norton
patent: 5300915 (1994-04-01), Higashi et al.
patent: 5306915 (1994-04-01), Matthews
patent: 5308980 (1994-05-01), Barton
patent: 5401968 (1995-03-01), Cox

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