Two-color radiation detector array and methods of fabricating sa

Details Two-color radiation detector array and methods of fabricating sa Two-color radiation detector array and methods of fabricating sa

1991-06-12

1992-09-22

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

250226, 357 30, H01J 4014

Patent

active

051499568

ABSTRACT:
Methods of fabricating a two-color infrared detector array, and an array of same fabricated by the methods. There is disclosed (a) selectively forming a plurality of first regions upon or within a surface of a substrate, the first regions being comprised of a first semiconductor material having a first type of electrical conductivity and a significant responsivity to wavelengths within a first spectral band. A second step (b) forms a substantially continuous layer comprised of a second semiconductor material over the surface of the substrate and over the plurality of first regions, the layer being comprised of semiconductor material having a second type of electrical conductivity for forming a plurality of first heterojunctions with the first regions. A third step (c) selectively forms a plurality of second regions upon the layer, individual ones of which are in registration with a corresponding one of the first regions. The second regions are comprised of a semiconductor material having the first type of electrical conductivity for forming a plurality of second heterojunctions with the underlying layer and a significant responsivity to wavelengths within a spectral band that does not significantly overlap the first spectral band.

REFERENCES:
patent: 4507674 (1985-03-01), Gaalema
patent: 4753684 (1988-06-01), Ondris et al.
patent: 4847489 (1989-07-01), Deitrich
patent: 4885619 (1989-12-01), Kosai
patent: 4961098 (1990-10-01), Rasbeck et al.
patent: 5001532 (1991-03-01), Petroff

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