Two bar resonant beam Coriolis rate sensor

Details Two bar resonant beam Coriolis rate sensor Two bar resonant beam Coriolis rate sensor

1996-06-25

1997-12-09

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

G01P 904

Patent

active

056963238

ABSTRACT:
By configuring a mounting ring connected to a center block with a pair of flexures and having a pair of vibrating beam force transducers connected between the mounting ring and the center block, an angular rate sensor utilizing Coriolis acceleration can be fabricated out of silicon. In this sensor, vibration of the sides of the mounting ring along an axis normal to the angular rate axis is provided by a source of magnetic flux which interacts with a drive current applied through conductors deposited on the mounting ring. The magnetic flux is provided by a permanent magnet and a pair of pole pieces that encompass the mounting ring. A digital representation of angular rate is generated by demodulating the frequency of the force transducers by the frequency of vibration drive frequency to obtain the difference in the force transducer frequencies.

REFERENCES:
patent: 5226321 (1993-07-01), Varnham et al.
patent: 5329815 (1994-07-01), Dunn et al.
patent: 5349855 (1994-09-01), Bernstein et al.
patent: 5476007 (1995-12-01), Nakamura

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