Two axis state for microscope

Details Two axis state for microscope Two axis state for microscope

2005-09-13

2005-09-13

Nguyen, Thong Q. (Department: 2872)

Optical: systems and elements

Compound lens system

Microscope

C359S368000, C359S391000

Reexamination Certificate

active

06943945

ABSTRACT:
A two axis stage for microscopes that is thin, has reduced vibration, and is adapted for increased stage transportation speeds is capable of being disposed inside a chamber without changing a floor-projected area. The XY stage comprises a base1, an X table2that can be moved in an X direction on the base1by an X feed screw7, and a Y table3that is supported on the X table2and movable in a Y direction. A third table4is disposed on the base1, the third table being movable in the Y direction by a Y-feed screw8positioned on the base1. Additionally, a slide unit14is disposed on the third table4, the slide unit14being movable in the X direction and connected with the Y table3.

REFERENCES:
patent: 5149967 (1992-09-01), Otaka
patent: 5263384 (1993-11-01), Suzuki
patent: 5323712 (1994-06-01), Kikuiri
patent: 5802925 (1998-09-01), Kanao
patent: 5812310 (1998-09-01), Stewart et al.
patent: 6781138 (2004-08-01), Novak et al.
patent: 7-142558 (1995-02-01), None

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