Two and a half dimension inspection system

Details Two and a half dimension inspection system Two and a half dimension inspection system

1997-12-19

2000-04-04

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

G01N 2188

Patent

active

060468033

ABSTRACT:
An inspection system for detecting surface defects on an object is disclosed, which includes a light source operable to emit a broad spectrum visible light to illuminate the object and a video source operable to receive an image from light reflected from the object surface at a predetermined direction. The system further includes an image processor operable to compare the intensity of the reflected light received by the video source with a range of predetermined intensity values so as to detect defects on the object surface. The inspection system is particularly suited for use in semiconductor manufacturing.

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patent: 4581706 (1986-04-01), Kato et al.
patent: 4692690 (1987-09-01), Hara et al.
patent: 5331397 (1994-07-01), Yamanaka et al.
patent: 5369492 (1994-11-01), Sugawara
patent: 5519496 (1996-05-01), Borgert et al.

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